Piezoresistive OEM Differential Pressure Sensor 2.5MPa Mems

• Type: Piezoresistive Pressure Sensor
• Component: SemiConductor Type
• For: Diffused Silicon Pressure Transmitter
• Output Signal Type: Analog Type
• Production Process: Integration
• Material: Stainless Steel
• Model NO.: 320
• Wiring Type: Four-Wire
• Measuring Medium: Liquid
• IP Rating: IP68
• Certification: RoHS
• Customized: Customized
• Transport Package: Foam+Carton
• Specification: dia. 19mm
• Trademark: Runpaq
• Origin: China

Product Description

Piezoresistive OEM Differential Pressure Sensor  2.5Mpa MEMS

Brief Introduction
320 OEM Differential Pressure Sensor is a standard and most popular sensor applied in air and liquid pressure measuring. A high sensitivity silicon pressure chip is employed in the sensor. The housing is filled with oil for pressure transmission. The most important specification for industry application is long term stability. 320 sensor is designed for industry application with perfect long-term stability
Diaphragm and pressure range
The diaphragm diameter has tight relation with pressure measured. Low pressure requires large diameter and high pressure needs small diameter. This is caused by oil expansion during temperature changing. It creates internal pressure due to the resistance of the diaphragm. The smaller diaphragm will create large internal pressure, and it is difficult to make zero compensation.
 

Caution:
• The metal diaphragm is very thin (approx. 20 um), so do not touch it with hard or sharp objects under any
circumstances. Even slight deformations can affect the pressure signal!
•  In the event of pressure overloads, please note that even pressure pulses < 0,1 us are "detected" by the pressure
sensor chip. Short, high pressure peaks can cause the sensor chip to break.

 

Construction performance

Electric & Environment Performance

Diaphragm: Stainless Steel 316L Housing: Stainless Steel 316L Pressure leading tube: Stainless Steel 316L O Ring: Φ16*1.8mm (Ding cyanide or fluororubber) Measuring Medium: Which is compatible with SS316L, Ding cyanide & fluororubber Packing Medium: Silicon Oil Net weight: 0.1kg

Power supply: ≤2mA (constant current) Insulation Resistance: ≤250MΩ@250VDC Bridge Resistance: 3kΩ~6kΩ Electrical Connection: Silicone shielded Vibration (20~5000Hz): 20G Useful Time (25ºC): >1*100 Million Times @Pressure Circulation(80%FS) Response Time: ≤1ms (90%FS) Storage Temp.: -40~+125ºC Operating Temp.: -40~+125ºC Compensation Temp.: 0~60ºC Wire Connection: 4 wire (typical) | 5 wire (available) 39×φ0.015, Silicon shield

Technical parameters

Parameters	Type	Max.	Unit
Non-linearity	0.2	0.3	%FS
Hysteresis	0.03	0.05	%FS
Repeatability	0.03	0.05	%FS
Zero output	+/-1	2	mV DC
FS output	85	100	mV DC
Excitation	1.5	-	k Ω
Heat hysteresis	+/-0.05	0.075	%FS
Zero temp. Drift* (1.5mA@-10~70ºC)	1.5	-	%FS,@25ºC
Sensitivity Temp. Drift*(1.5mA@-10~70ºC)	1.5	-	%FS,@25ºC
Long-term stability	+/-0.2	+/-0.3	%FS/year

Remarks: Nonlinearity calculated based on least square method    *The typical value of 0~10kPa and 0~20kPa's zero temperature

Standard range

Range	Range	Overload	Break	Pressure
0~10KPa	0~0.01MPa	300%FS	600%FS	differential
0~20KPa	0~0.02MPa	300%FS	600%FS	differential
0~35KPa	0~0.035MPa	300%FS	600%FS	differential
0~70KPa	0~0.07MPa	200%FS	600%FS	differential
0~100KPa	0~0.1MPa	200%FS	500%FS	differential
0~250KPa	0~0.25MPa	200%FS	500%FS	differential
0~400KPa	0~0.4MPa	200%FS	500%FS	differential
0~600KPa	0~0.6MPa	200%FS	500%FS	differential
0~1.0MPa	0~1.0MPa	200%FS	300%FS	differential
0~1.6MPa	0~1.6MPa	200%FS	300%FS	differential
0~2.5MPa	0~2.5MPa	200%FS	300%FS	differential

Notes: G for Gauge pressure; A for Absolute pressure; D for Differential pressure; S for Sealed gauge.

Specification

parameters	Min	Typ	Max	Unit	Notes
sensitivity	13.2	20	26.5	mV/V@FS	-
zero pressure output	-6.0	-	8.0	mV/V	measured at ambient
pressure non-linearity	-0.10	-	0.10	%span	best fit straight line
pressure hysteresis	-0.05	-	0.05	%span	-
input/output resistance	3800	4400	5800	Ω	-
temp. coefficient-span	-1450	-1250	-1000	ppm/ºC	Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC
temp. coefficient-offset	-	1	-	uV/V/ºC	Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC
temp. coefficient-resistance	1300	1510	1750	ppm/ºC	Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC
thermal hysteresis-span	-0.025	-	0.25	%span	Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC
thermal hysteresis-offset	-0.025	-	0.25	%span	Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC
line (common mode)pressure	-	-	1000	psi	-
line pressure effect on zero	-	-	0.5	%span/1kpsi	-
pressure overload	-	-	3X	rated	for high end port, rated or 1kpsi whichever is less,for low endport, rated or 150psi,whichever is less.
pressure burst	-	-	4X	rated	Max pressure can be applied to a transducer without reupture of either sensing element or transducer
operating temp.	-40	-	125	ºC	temperature range for cable and connector is -20ºC to 105ºC
storage temp.	-40	-	125	ºC	temperature range for cable and connector is -20ºC to 105ºC
vibration (10-2000Hz)	-	-	20	g	-
insulation resistance(50Vdc)	50	-	-	MΩ	between case and sensing element
output load resistance	5	-	-	MΩ	load resistance to reduce measurement errors due to output loading
supply voltage	-	5	9.5	V	-
supply current	-	-	1.5	mA	-
voltage breakdown	-	-	500	Vrms	at dry air direct mechanical contact with diaphragm is prohibited. Diaphragm surface must be free of defects. (scratches, punctures, finger prints, etc) for device to operate properly.
endurance (FS@25ºC)	-	1000000	-	cycles	-
Media compatibility	all fluid and gases compatible with SS316 & nitrile

Caution: when handling parts with exposed diaphragms, use protective cap whenever devices are not in used.
Noteds: above data is based on the following conditions: *range: 0-15psid, power supply:5V, material of O-ring: Viton

Drawing & wiring diagram

Dimensions

Model selections

Note: 1. Extremely attention must be paid to sensor installation process to avoid any miss conduction that affect the sensor performance,
2. please protect the diaphragm and the compensated board carefully to prevent any damage. 3.  Please contact us if your requested working
temperature lower than -20ºC