Basic Info.
Type
Piezoresistive Pressure Sensor
Component
SemiConductor Type
For
Diffused Silicon Pressure Transmitter
Output Signal Type
Analog Type
Production Process
Integration
Product Description
Piezoresistive OEM Differential Pressure Sensor 2.5Mpa MEMSBrief Introduction320 OEM Differential Pressure Sensor is a standard and most popular sensor applied in air and liquid pressure measuring. A high sensitivity silicon pressure chip is employed in the sensor. The housing is filled with oil for pressure transmission. The most important specification for industry application is long term stability. 320 sensor is designed for industry application with perfect long-term stability
Diaphragm and pressure rangeThe diaphragm diameter has tight relation with pressure measured. Low pressure requires large diameter and high pressure needs small diameter. This is caused by oil expansion during temperature changing. It creates internal pressure due to the resistance of the diaphragm. The smaller diaphragm will create large internal pressure, and it is difficult to make zero compensation.
Caution: • The metal diaphragm is very thin (approx. 20 um), so do not touch it with hard or sharp objects under any circumstances. Even slight deformations can affect the pressure signal! • In the event of pressure overloads, please note that even pressure pulses < 0,1 us are "detected" by the pressure sensor chip. Short, high pressure peaks can cause the sensor chip to break. |
Construction performance | Electric & Environment Performance |
Diaphragm: Stainless Steel 316L Housing: Stainless Steel 316L Pressure leading tube: Stainless Steel 316L O Ring: Φ16*1.8mm (Ding cyanide or fluororubber) Measuring Medium: Which is compatible with SS316L, Ding cyanide & fluororubber Packing Medium: Silicon Oil Net weight: 0.1kg | Power supply: ≤2mA (constant current) Insulation Resistance: ≤250MΩ@250VDC Bridge Resistance: 3kΩ~6kΩ Electrical Connection: Silicone shielded Vibration (20~5000Hz): 20G Useful Time (25ºC): >1*100 Million Times @Pressure Circulation(80%FS) Response Time: ≤1ms (90%FS) Storage Temp.: -40~+125ºC Operating Temp.: -40~+125ºC Compensation Temp.: 0~60ºC Wire Connection: 4 wire (typical) | 5 wire (available) 39×φ0.015, Silicon shield |
Technical parametersParameters | Type | Max. | Unit |
Non-linearity | 0.2 | 0.3 | %FS |
Hysteresis | 0.03 | 0.05 | %FS |
Repeatability | 0.03 | 0.05 | %FS |
Zero output | +/-1 | 2 | mV DC |
FS output | 85 | 100 | mV DC |
Excitation | 1.5 | - | k Ω |
Heat hysteresis | +/-0.05 | 0.075 | %FS |
Zero temp. Drift* (1.5mA@-10~70ºC) | 1.5 | - | %FS,@25ºC |
Sensitivity Temp. Drift*(1.5mA@-10~70ºC) | 1.5 | - | %FS,@25ºC |
Long-term stability | +/-0.2 | +/-0.3 | %FS/year |
Remarks: Nonlinearity calculated based on least square method *The typical value of 0~10kPa and 0~20kPa's zero temperature
Standard rangeRange | Range | Overload | Break | Pressure |
0~10KPa | 0~0.01MPa | 300%FS | 600%FS | differential |
0~20KPa | 0~0.02MPa | 300%FS | 600%FS | differential |
0~35KPa | 0~0.035MPa | 300%FS | 600%FS | differential |
0~70KPa | 0~0.07MPa | 200%FS | 600%FS | differential |
0~100KPa | 0~0.1MPa | 200%FS | 500%FS | differential |
0~250KPa | 0~0.25MPa | 200%FS | 500%FS | differential |
0~400KPa | 0~0.4MPa | 200%FS | 500%FS | differential |
0~600KPa | 0~0.6MPa | 200%FS | 500%FS | differential |
0~1.0MPa | 0~1.0MPa | 200%FS | 300%FS | differential |
0~1.6MPa | 0~1.6MPa | 200%FS | 300%FS | differential |
0~2.5MPa | 0~2.5MPa | 200%FS | 300%FS | differential |
Notes: G for Gauge pressure; A for Absolute pressure; D for Differential pressure; S for Sealed gauge.Specificationparameters | Min | Typ | Max | Unit | Notes |
sensitivity | 13.2 | 20 | 26.5 | mV/V@FS | - |
zero pressure output | -6.0 | - | 8.0 | mV/V | measured at ambient |
pressure non-linearity | -0.10 | - | 0.10 | %span | best fit straight line |
pressure hysteresis | -0.05 | - | 0.05 | %span | - |
input/output resistance | 3800 | 4400 | 5800 | Ω | - |
temp. coefficient-span | -1450 | -1250 | -1000 | ppm/ºC | Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC |
temp. coefficient-offset | - | 1 | - | uV/V/ºC | Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC |
temp. coefficient-resistance | 1300 | 1510 | 1750 | ppm/ºC | Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC |
thermal hysteresis-span | -0.025 | - | 0.25 | %span | Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC |
thermal hysteresis-offset | -0.025 | - | 0.25 | %span | Over the temperature range -20ºC to +85ºC(0ºC to 50ºC for 1psi, 0ºCto 70ºC for 5psi)@25ºC |
line (common mode)pressure | - | - | 1000 | psi | - |
line pressure effect on zero | - | - | 0.5 | %span/1kpsi | - |
pressure overload | - | - | 3X | rated | for high end port, rated or 1kpsi whichever is less,for low endport, rated or 150psi,whichever is less. |
pressure burst | - | - | 4X | rated | Max pressure can be applied to a transducer without reupture of either sensing element or transducer |
operating temp. | -40 | - | 125 | ºC | temperature range for cable and connector is -20ºC to 105ºC |
storage temp. | -40 | - | 125 | ºC | temperature range for cable and connector is -20ºC to 105ºC |
vibration (10-2000Hz) | - | - | 20 | g | - |
insulation resistance(50Vdc) | 50 | - | - | MΩ | between case and sensing element |
output load resistance | 5 | - | - | MΩ | load resistance to reduce measurement errors due to output loading |
supply voltage | - | 5 | 9.5 | V | - |
supply current | - | - | 1.5 | mA | - |
voltage breakdown | - | - | 500 | Vrms | at dry air direct mechanical contact with diaphragm is prohibited. Diaphragm surface must be free of defects. (scratches, punctures, finger prints, etc) for device to operate properly. |
endurance (FS@25ºC) | - | 1000000 | - | cycles | - |
Media compatibility | all fluid and gases compatible with SS316 & nitrile |
Caution: when handling parts with exposed diaphragms, use protective cap whenever devices are not in used.
Noteds: above data is based on the following conditions: *range: 0-15psid, power supply:5V, material of O-ring: Viton
Drawing & wiring diagramDimensionsModel selectionsNote: 1. Extremely attention must be paid to sensor installation process to avoid any miss conduction that affect the sensor performance,
2. please protect the diaphragm and the compensated board carefully to prevent any damage. 3. Please contact us if your requested working
temperature lower than -20ºC
Address:
Room 321, Building 2, No. 125 Laiting Road(S), Songjiang district, Shanghai, China
Business Type:
Manufacturer/Factory, Trading Company
Business Range:
Construction & Decoration, Electrical & Electronics, Industrial Equipment & Components, Instruments & Meters, Manufacturing & Processing Machinery, Metallurgy, Mineral & Energy
Management System Certification:
ISO 9001, ISO 14001, OHSAS/ OHSMS 18001
Company Introduction:
Hangzhou Runpaq Technology Co., Ltd is a national key high-tech enterprise serving in fields of new energy management system and equipment, main services include: HVAC central air-conditioning and cold storage, solar distributed energy & regional energy, green house commercial building construction.
We have integrative certification of mechanical & electrical installation and building intelligentized design & construction, production license of measurement production, and is able to contract projects of building mechanical and electrical installation, building intellectualizing, distributed energy, combined cold & heat & power supply and new energy application.
RUNPAQ initiates a low-carbon building energy route with the concept of "low-carbon energy, future of architecture":
1. Developing energy-saving technologies to improve the electricity efficiency and reduce the energy needs;
2. Developing new energies to reduce the dependence of building on mineral energy.